Oil-free dry mechanical vacuum pump (also referred to as a dry mechanical pump) means that the pump can start pumping air under atmospheric pressure and can directly discharge the pumped gas into the atmosphere. There is no oil or other working medium in the pump chamber, and The ultimate pressure of the pump is the same as or close to the mechanical vacuum pump of the oil-sealed vacuum pump.
At present, most of the mechanical vacuum pumps used in the vacuum industry use fluids such as oil, water, or other polymers as the working medium of the pump, which plays various functions such as cooling, sealing, and lubrication in the pump. With the development of science and technology and the expansion of vacuum application fields, there are two urgent problems to be solved in the original mechanical vacuum pump and the pumping system composed of it: one is that the working medium of the pump backflows and pollutes the pumped container, and this backflow The flow affects the quality, quantity of the product in many cases and increases the maintenance cost of the equipment. Secondly, due to the reaction substances in some processes, the medium in the vacuum pump seriously deteriorates, so the pump cannot work normally.
For ordinary oil-free vacuum systems, although oil-sealed vacuum pumps can be added with accessories such as cold traps or adsorption traps to prevent backflow, they cannot completely solve the problem and make the system complex. The ideal use effect can be achieved by using an appropriate type of dry mechanical vacuum pump.
Dry mechanical vacuum pumps are widely used, mainly in the following aspects:
1) In the polysilicon preparation process in low-pressure chemical vapor deposition;
2) Semiconductor etching process. Corrosive gases and abrasive particles are often used or generated in these production processes;
3) For some particle-generating processes other than the semiconductor process, it is not expected that the particles will be mixed into the pump oil, but the particles are expected to be discharged out of the pump, and a certain type of dry mechanical vacuum pump can meet the requirements;
4) Distillation, drying, defoaming, packaging, etc. in the chemical industry, pharmaceutical industry, and food industry, to prevent pollution caused by organic solvents, suitable for dry vacuum pumps;
5) It is used as the backing pump of the general oil-free clean vacuum system to prevent oil pollution.
In recent years, dry mechanical vacuum pumps have developed rapidly.
Dongguan Microvacuum Technology Co., Ltd. is a professional manufacturer of medical oil-free piston vacuum pumps and air compressors. With more than 15 years of product development and manufacturing experience, it has the latest complete sets of production equipment, as well as advanced testing equipment.
